An Electric Field Microsensor with Mutual Shielding Electrodes
نویسندگان
چکیده
منابع مشابه
A High Sensitivity Electric Field Microsensor Based on Torsional Resonance
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ژورنال
عنوان ژورنال: Micromachines
سال: 2021
ISSN: 2072-666X
DOI: 10.3390/mi12040360